The Proceedings of The Computational Mechanics Conference
Online ISSN : 2424-2799
2002.15
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Three-Dimensional Dislocation Density Analysis of Semiconductor Single Crystal during Growth Process
Yukihiro FUJIYAMA, Noriyuki MIYAZAKI
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Keywords: Dislocation density, Finite element method, Semiconductor single crystal
CONFERENCE PROCEEDINGS FREE ACCESS

Pages 305-306

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© 2002 The Japan Society of Mechanical Engineers
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