The Proceedings of The Computational Mechanics Conference
Online ISSN : 2424-2799
2002.15
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Simulation of dislocation accumulation in ULSI cells with STI structure
Tetsuya OHASHI, Michihiro SATO, Takuya MARUIZUMI, Isao KITAGAWA
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Keywords: ULSI, Shallow trench islation, dislocation, crystal plasticity analysis, finite element method
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Pages 313-314

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© 2002 The Japan Society of Mechanical Engineers
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