The Proceedings of The Computational Mechanics Conference
Online ISSN : 2424-2799
2007.20
Session ID : 619
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619 Numerical Evaluation of dislocation accumulation in Impurity Doped-ULSI Cells
Michihiro SATO, Tetsuya OHASHI, Takuya MARUIZUMI, Isao KITAGAWA
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Keywords: ULSI, Shallow trench isolation, dislocation, crystal plasticity analysis, finite element method
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© 2007 The Japan Society of Mechanical Engineers
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