電気機械システムの圧電ｰ逆圧電ｰ構造連成現象に対する分離反復型解法に関する研究

抄録

In micro-electro-mechanical systems using piezoelectric bimorph actuators such as FWNAV, small displacements given by the actuators can be magnified using a transmission using the flexible structure. Hence, in these systems, coupling among the direct and inverse piezoelectric effects, and the flexible structure occurs. In this study, a partitioned iterative method is proposed based on the block SUR algorithm for this strongly coupled problem, and the basic performances are demonstrated in numerical examples.