The Proceedings of Conference of Chugoku-Shikoku Branch
Online ISSN : 2424-2764
2002
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Formation of Diamond-like Carbon Film by Electrostatic Particle-Impact-Deposition : Effect of Magnetic and RF Fields on Film Growth
Takashi IDE, Takeshi YOSHIOKA, Daiki HIDAKA, Shouji KISHIIIUE
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Keywords: DLC, Electrostatic acceleration, ultra-fine particle
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Pages 173-174

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© 2002 The Japan Society of Mechanical Engineers
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