The Proceedings of Conference of Chugoku-Shikoku Branch
Online ISSN : 2424-2764
2006
Session ID : 419
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419 Measurement of film thickness in neighborhood of point contact by ultrasonic method
Takuya Nagami, Akitoshi Takeuchi, So Toda, Seiichi Terada
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Keywords: Ultrasonic method, Light interference method, Film thickness, Newton ring
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© 2006 The Japan Society of Mechanical Engineers
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