The Proceedings of Conference of Chugoku-Shikoku Branch
Online ISSN : 2424-2764
2006
Session ID : 420
Conference information
420 Theoretical Analyses on Vibration Amplitude of a Microcantilever Observed by Optical Lever AFM
Shigeaki SUYAMA, Hiroshige MATSUOKA, Shigehisa FUKUI
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Keywords: Atomic Force Microscope, Ultrahigh Accuracy Measurement, Dynamic Measurement, Cantilever, Free Vibration, Forced Vibration, Optical Lever Method, Correction Factor, Spring Constant Ratio
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© 2006 The Japan Society of Mechanical Engineers
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