The Proceedings of Conference of Chugoku-Shikoku Branch
Online ISSN : 2424-2764
2012.50
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708 Characterization of reactive ion etching with the etching equipment having water-cooled columnar electrode
Tomoki MATSUI, Yuta NAKASHIMA, Kazuyuki MINAMI
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Keywords: Reactive ion etching, Columnar electrode, Cyrindrical work, Cooling system
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Pages 70801-70802

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© 2012 The Japan Society of Mechanical Engineers
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