The Proceedings of Conference of Chugoku-Shikoku Branch
Online ISSN : 2424-2764
2012.50
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709 Development of transfer mask technique for cylindrical reactive ion etching
Yugo TAKEUCHI, Kazuyuki MINAMI, Yuta NAKASHIMA
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Keywords: Transfer mask, Reactive ion etching, Cylindrical surface, Stencil Mask
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Pages 70901-70902

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© 2012 The Japan Society of Mechanical Engineers
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