639 Development of a Piezoelectric Pump : Vibration Characteristics of the Piezoelectric Vibrator

Abstract

In the application of a piezoelectric vibrator as an actuator of piezoelectric pump, it is very important to produce a large bending displacement of the vibrator. In this paper, for improving the productivity and the performance of a piezoelectric pump, vibration analysis of the piezoelectric vibrator has been carried out and the vibration characteristics have been investigated.