Abstract
A PZT self-actuation self-detection-type AFM probe-cantilever has attracted the attention of many researchers because liquid AFM measurements can use advantages of the piezoelectric cantilever, e.g., laser light focusing is not necessary, as it is with conventional optical lever method. Moreover, to avoid damaging a bio-related sample during highly accurate observations in liquid, the vibration amplitude of the cantilever must be firmly stable and sufficiently small. To date, PZT self-actuation self-detection microcantilevers have been prototyped, and experiments have shown that a positive velocity feedback loop using a self-detected signal induces self-excited oscillation in the microcantilever.
