The Proceedings of the Dynamics & Design Conference
Online ISSN : 2424-2993
2006
Session ID : 501
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501 Feed-forward Control of MIMO system for Large-size and Lightweight Isolation Table
Daichi WATANABEToru WATANABEKazuto SETO
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
This paper proposes a control method of an active isolation system with low stiffness and lightweight isolation table subjected to direct impulse excitation on it. In the case of large-size and lightweight isolation table, multi vibration modes appear on an isolation table in lower frequency region. Therefore, we construct a 5-DOF lumped model of the isolation table using the reduced order physical modeling method which is effective for controlling multi modal vibrations. For designing a controller, two-degree-of-freedom controller combining feed-forward controller for MIMO system with LQ is used. Usefulness of proposed modeling method and controller is confirmed through numerical simulations and experimental results.
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© 2006 The Japan Society of Mechanical Engineers
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