502 Active vibration and position control of a vibration isolation table by motor-driven regulators with taking account of redundancy of DOF

Abstract

Active control of a vibration isolation table using pneumatic actuators is studied in this paper. A 3DOF physical model of the vibration isolation table is constructed. We introduce a method to determine the air pressure of each actuator with taking account of redundancy of the actuators and sensors. The regulator for the pneumatic actuator is driven by a stepping motor. Type I digital servo system is applied to control the vibration and position of the vibration isolation table. Control performance of the system is verified experimentally and the results are shown in figures.