Abstract
In this paper, a new type drive system of the MEMS (micro electro mechanical systems) resonant-type optical scanner is proposed and researched feasibility of a practical use. In this drive system, scanner mirror is supported with two pairs of bars which are stepped in a opposite direction each other. When the harmonic axial force is applied to the ends of the supporting bars, torsional vibration of the mirror is excited due to the deflection of the bars. The effects of the bar dimensions on resonance frequency, amplitude of rotation angle and maximum value of the first principal stress are investigated by comparing simple theoretical results with FEM-based simulation.
