Abstract
The purpose of a present investigation is to clarify the vibration characteristic of the piezoelectric vibrator which has been applied in a small pump. This piezoelectric vibrator is coated with silicon rubber, and is influenced by a fluid element of pump chamber. Experiments and FEM analysis were carried out to investigate the influence of both water and air, which were hermetically sealed in the pump chamber. As a result, the resonance frequencies of piezoelectric vibrator could be simulated approximately by FEM analysis. In the case of the water, it was clear that the resonance frequencies of piezoelectric vibrator became lower and decreased the amplitude displacement.
