Abstract
In micro-processing fields such as semiconductor manufacturing and precise measuring, vibration isolation system is an extremely important configuration element. The purpose of this study, by using the layout effect of a magnetic material piece on the passive magnetic levitated bulk HTS sample, is to finding out the performance of variable magnetic stiffness for adaptable to "vibration from ground" and "variation of payload". In this paper, we describe the preliminary experimental result of the magnetic stiffness acting on a bulk HTS sample putting on a ferromagnetic material piece on Halbach permanent magnet array.