Abstract
We have developed an electrostatic three-axis MEMS accelerometer with single-mass and vertical comb electrodes. In this paper, we measured the cross-axis sensitivity using three-axis vibration stage based on sensitivity matrix concept. The main axis sensitivities of x, y, and z-axis are 738, 743, and 238mV/g, respectively, which are slightly lower than simulation. The cross-axis sensitivities are 0.4-15.6% of main axis sensitivities, which is larger than the simulated value. The reasons are estimated to be the misalignment of the sensor to the vibration stage and unexpected rotational motion of the three-degree of freedom shaker.
