2205 A manufacturing supporting method based on polishing case data

Abstract

We have defined XML schema of polishing case data, which are composed of material specifications, processing conditions, polishing material, machine specifications, and evaluation results. More than one hundreds parameters are dominant. Polishing process is repeated varying the associated parameters until fine surface is obtained. The structure of case data becomes complicated and difficult to handle. We proposed a effective method and examined it through inquiry examples and evaluated it to be applicable to manufacturing supporting method.