Abstract
Internet of things has been realized due to the rapid growth of the information and communication technology. Most system developments, thus, become complicated. This paper introduces the QFD developed using the concept of M model, which aims to comprehensively deal with design and defines activities as the reasoning in the designers' brain. This QFD enables the designers to extract the design elements based on diverse requirements (requirements of the customer, company, society, etc.) and the circumstance of the design objects. This paper also introduces the methods to analyze the complex relationships between design elements (correspondence analysis, ISM, DSM, and MDM) and illustrates the application to a lithography system design to confirm the effectiveness.