環境工学総合シンポジウム講演論文集
Online ISSN : 2424-2969
セッションID: 310
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310 固体アルカリを用いた半導体用PFC14の乾式分解(大気環境保全・改善技術(2))
竹内 章浩渡邉 徴雄岩佐 慶夫鈴木 憲司平林 大介
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会議録・要旨集 フリー

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An effective decomposition method for perfluorocarbon-14 (PFC14 ; CF_4) which is known as a global warming substance, has been developed. Successfully, this method decomposed PFC14 under dry conditions using a solid alkali and γ-alumina, and any liquid waste treatment was not required for outlet gas treatment as an expecting feature. We found that fluorocarbon-14 was decomposed quite enough, and the experimental result could be satisfied with the national criterion. The decomposition temperature was lower than that with the typical combustion system applied for almost all perfluorocarbons except for PFC14.
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© 2009 一般社団法人 日本機械学会
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