The Proceedings of the Fluids engineering conference
Online ISSN : 2424-2896
2001
Session ID : 106
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106 Ionization Characteristics in Atmospheric Pulse Plasma CVD Machine and its Film Fabricating Process
Seizo KATOKatsuyuki FURUHATAShinichi KAJINO
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CONFERENCE PROCEEDINGS FREE ACCESS

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© 2001 The Japan Society of Mechanical Engineers
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