Abstract
Recently, the study on the flow around a wing at low Reynolds number has been carried out actively. It was also desired to measure the minute pressure on the wing surface with good accuracy. However, the commercial sensors were not suitable for the small pressure and their sizes were too large to put them on the wing surface. Thus, we devised the manufacturing process of a semiconductor-type sensor for the pressure measurement within the range of several Pa using MEMS (Micro Electro Mechanical Systems) technology. Furthermore, we evaluated the output characteristics of the sensor.
