抄録
Micro-pumps are very important for advanced micro fluidic systems which have been well investigated during the last decades. We developed a valve-less micro-pump with one diffuser/nozzle shaped channel and a variable volume chamber which produces an oscillating flow. Micro-pumps require at least total pump head of 40 kPa to apply micro fluidic devices. In order to achieve above pump head, optimization of channel shape is required by investigation of internal flow for the valve-less micro-pump. In this study, flow visualization of internal-flow for the valve-less micro-pump had done.