抄録
Recently, low cost cleaning technique has been demanded to remove small particle that causes quality and yield ratio loss in manufacturing process. In this study, in order to investigate the particle removal characteristics of suction and jet flow in terms of energy saving, we performed particle removal experiment. Furthermore, to enhance the particle detachment, we investigated the effect of surface vibration for particle detachment. For consideration of the experimental results, we analyzed the flow field by using FLUENT. As a result, the particle removal efficiency of jet flow is higher than that of suction flow, even jet flow rate is about 80 percent lower than that of suction flow rate. And the wall shear stress generated by jet flow acts on wide region compare to the suction flow. It was also found that the inertia force due to vibration could assist the particle removal.
