液体中での表面微粒子の付着力測定とその剥離過程の可視化

抄録

In various manufacturing process, particle contamination is one of the critical problems. A wet cleaning is widely used, but it is difficult to evaluate the cleaning performance. In this study, first we have tried to make high adhesion force samples which can evaluate particle removal rate of wet cleaning like PVA brush scrubbing or droplets impacts. Second, we measured its removal force directly by using self-sensitive cantilever. We have already measured the removal force in the air. We tried to measure also in the water in this study. As a result, the peeling forces in both air and water were about 10² μN. We estimated that this is because the influences of humidity like liquid bridge force are very small compared with adhesion force. Finally, using this sample, we demonstrated the cleaning performance of PVA brush scrubbing. We could quantitatively evaluate wet cleaning by using particle removal rate.