円形平板への液滴列衝突における形成液膜の観察

抄録

Droplets impact are widely used in the cleaning step of semiconductor device manufacturing, however the detail of liquid film structure formed by the impact of drops is not clarified. In this study, we experimentally investigated behavior of liquid film which is formed by a droplet train impact. Especially, we focus on the diameter of hydraulic jump on a circular plate. The effects of nozzle diameter and liquid flow rate on the jump diameter were investigated. As a result, the jump diameters for the case of droplets impact were greater than that of liquid column impact. The hydraulic jump was observed under smaller water flow rate condition compare to the liquid column impact. In addition, the liquid film structure after hydraulic jump was affected by the circular plate edge and state of the jet.