光ファイバープローブ及びレーザー変位計を用いた二流体ジェット噴射表面における気液相検出及び形成液膜厚さ計測

抄録

The two-fluid jet method, which impacted droplets accelerated by a high-speed air stream, is widely used in cleaning the semiconductor manufacturing process. A wafer must always be covered with a liquid film during the cleaning process because local drying may cause some defects. However, the liquid film thickness formed by the high-speed airflow and droplets and whether a liquid film exists on the impingement surface have not been investigated. In this study, we tried to measure the liquid film thickness using an optical fiber probe and a laser displacement meter. We discuss the return light signal from the optical fiber probe installed on the surface irradiating the two-fluid jet.