抄録
The jitter is one of parameters which indicate the performance of the polygon laser scanner. The facet shapes of the mirrors and variation of inscribed circle radius of each facet affect the jitter. However, the effect of the facet shape on the jitter has not been investigated. In this paper, we measured the each facet shape of the mirrors with a laser interferometer. The measured facet shapes were approximated by a polynomial expression. The simulated jitter from the approximated facet was in good agreement with the measured jitter.
