The Proceedings of Conference of Hokuriku-Shinetsu Branch
Online ISSN : 2424-2772
2006.43
Session ID : 406
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406 A study of disk-shaped sputtering target : Effect of water pressure and thermal stress
Yukitatsu KASHIMURA, Kazuo ISHIBASHI
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Keywords: sputtering target, fracture criterion, water pressure, temperature gradient, incapacitation of cooling
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© 2006 The Japan Society of Mechanical Engineers
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