The Proceedings of Conference of Hokuriku-Shinetsu Branch
Online ISSN : 2424-2772
2006.43
Session ID : 407
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407 A Study of Sputtering Target : Construction of optimal design for sputtering target
Yukitatsu KASHIMURA, Tetsuya MIYAZAKI
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Keywords: Sputtering target, Sputtering method, Optimize design
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© 2006 The Japan Society of Mechanical Engineers
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