In recent years, contact-control problem with a semiconductor device is one of the most important problems. The ultimate goal is to develop a soft-contact-probing system (Micro Manipulation System equipped with Multifunctional Generic Sensor) making good use of multi sensor-information. From an approach stage to the measurement stage of an electrical property, these are divided into each step of operation. In this paper, it presents the Micro-Probing-Unit equipped with the New 3-D Force Sensors, and detection of contact force using the Micro-Probing-Unit.
