Abstract
A developed grinding system employing super-fine abrasive wheels was used to fabricate ultra-fine micro-tools having a variety of shapes. The machine successfully produced a cylindrically shaped micro-tool having a tip diameter of less than I μm. The surfaces of the produced micro-tools were investigated by advanced analytical methods. Fracture strength of the micro-tools was evaluated by nano-indentation testing, and their surface chemical properties were analyzed by XPS. The results suggest that the surface of processed micro-tools might have been strengthened by allowing the penetration and diffusion of oxygen atoms into the material, and allowing oxidation.
