The Proceedings of Ibaraki District Conference
Online ISSN : 2424-2683
ISSN-L : 2424-2683
2007
Session ID : 1010
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1010 Adhesion strength reliability evaluation of thin film technology
Hirorou NOMURAHideto SUZUKI
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
The use of a hard thin film is advanced by a recent automotive field. However, adhesion strength of a hard thin film is related directly at the product-life cycle. Adhesion was evaluated from the analysis of the destruction phenomenon on the interface between film with the machine of Nano-indentar hardness examination instrument. As a result, it was able to be confirmed that SEM in the film section was observed, and the destruction of the interface by the minimum pushing examination related to adhesion.
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© 2007 The Japan Society of Mechanical Engineers
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