Abstract
Thin films of diamond-like carbon (DLC) and Aluminum nitride (AIN) films have been deposited on Aluminum alloy substrates using Unbalanced Magnetron Sputtering (UBMS). With N_2 gasses flow rate 10 ml/min to 40 ml/min, the effect of N_2 gasses flow rate on A1N films mechanical properties was investigated by scanning electron microscope (SEM), dynamic ultra-micro hardness tester. AIN film hardness increases with increasing N_2 gasses flow rate and reaches the maximum 20.1 GPa at 20ml/min. Tribological tests undertaken under normal load of ION using ball on disk friction and wear tester for the samples of DLC with and without A1N interlayer. The use of AIN interlayer reduces the friction coefficient and increase wear life of the film.
