抄録
This study aims to fabricate high-precision three-dimensional microstructures by the EDM milling with combination of the layer-by-layer machining and the linear tool wear compensation methods applying a constant cut depth smaller than the tool electrode radius in order to make greater use of the tool electrode tip roundness. At first, single layer linear microgrooves were fabricated on a stainless steel workpiece by a Cu-W cylindrical tool lectrode with 100 |am diameter after evaluating the tool wear rate, which was ecessary for the linear tool wear compensation. After that, the layer-by-layer EDM milling tests were performed by applying the linear tool wear compensation. As a result, it was confirmed that the microgrooves with 100 (im wide and depth corresponding to the layer number and cut depth were successfully fabricated with relatively high shape stability, although their bottoms possess circular arc shapes originating from the tool electrode tip shape. Finally, a (quasi) spherical concave shape was successfully fabricated by applying aforementioned method with planetary tool electrode motion.
