In recently years, the request of high quality processing has been growing because of technological progress. ELID grinding is technology which grants the request. This technology is processing method using electricity, it produce surface modification effect of work piece. We use oxygen micro-bubble contained grinding fluid for improvement of ELID dressing and surface modification effect. We processed pure titanium in non-ELID, ELID and ELID with O_2 micro-bubble and compared volume of material removed and surface properties. As a result, better processing characteristics was obtained by ELID grinding with O_2micro-bubble.