抄録
The purpose of this research is to increase the processing efficiency by performing ELID grinding using fixed abrasive grains for brittle material of high hardness such as sapphire. Grinding of sapphire involves problems of falling off and burying of abrasive grains. As a solution, use a high hardness iron plating diamond wheel made by electroplating method. Moreover, in order to obtain good surface roughness for sapphire, it is considered effective to increase the processing pressure applied to the abrasive grains. Therefore, we developed a straight grinding stone with the hardness is set at a Vickers hardness value of 600. And, this grinding wheel was evaluated using Voronoi diagram. This grinding wheel and sapphire were attached to a
triaxial processing machine, and ELID grinding processing was performed on the A side of sapphire. As a result of experiments, it was confirmed that the developed grinding wheel has removal ability against sapphire. Moreover, it became possible to quantify the evaluation by using Voronoi diagram.