Abstract
The objective of the present paper is to investigate Reynolds number dependence of separation and reattachment process over a backward-facing step in a low Reynolds number range. A study on low Reynolds number flow such as the flow around the micro device is strongly required in MEMS development. The Reynolds number based on step height is set at 130 to 3700 in the micro sensing wind tunnel. The reattachment and separation points are measured by Micro Flow Sensor (MFS), and the flow field is visualized with a high-speed video camera. The results show a strong dependence of Reynolds number on the flow behavior on the step and opposite-side wall downstream of the step.
