抄録
This paper describes thin film inductor using nano-crystalline Fe-Zr-O thin film. Nano-crystalline Fe-Zr-O film has a low loss at a high frequency because of its high electrical resistivity, ρ of 1000μ Ωcm. Furthermore, Fe-Zr-O has good soft magnetic properties, which are 46A/m of coercive force, Hc, 1000 of permeability, μ', 1.24T of saturation magnetization, Is. It is possible to keep eddy current loss down up to MHz range to use nano-crystalline Fe-Zr-O thin film. Therefore, the thin film inductor using nano-crystalline Fe-Zr-O thin film shows high quality factor, Q over 8 at MHz range. DC-DC converter using thin film inductor exhibits high efficiency, η of 80% in the buck converter.
