抄録
This paper reports a multi-mode micro-mechanical optical switch whose actuating mechanism is based on thermally induced capillary action. We propose novel fabrication processes for integrating the thermo-capillary optical switch into a polymer-based waveguide, and demonstrate its driving action. Noting that Ti has resistance against oxygen gas, we used O_2 RIE with Ti mask to form a slit with a high aspect ratio of 10. We have developed a technique for planarizing the upper cladding just by applying a polymer coating without polishing. Therefore we could drastically reduce the fabrication time. We hermetically sealed the slit by thermal lamination at a temperature below the glass transition temperature (Tg). We formed an oil column with a small volume using an oil injection method, which we developed. The switch element performed both switching and latching actions successfully, confirming the basic operations of the switch.
