抄録
As a simple manufacturing method for high-precision micro-spherical bearing, the micro forming technique of metallic glass was applied. Metallic glasses are amorphous alloys with the wide supercooled liquid region. Those exhibit amorphous alloy's characteristics at room temperature. Moreover, in the supercooled liquid state, its viscosity is as low as that of a heated conventional glass. In this study, a Zr based metallic glass (Zr_<55>Cu_<30>Al_<10>Ni_5) which equal stainless steel in the strength at room temperature was used. The micro spherical bearings were formed from a polished steel ball of the 3mm diameter as die in the supercooled liquid state. The profile error of the formed bearings was less than 3μm and the Vickers hardness, Hv 545 or more.
