IIP情報・知能・精密機器部門講演会講演論文集
Online ISSN : 2424-3140
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121 マイクロモータ
太田 斎小原 隆雄荒木 健武田 宗久
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p. 90-91

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Fabrication process of micro electro magnetic motor has been developed. Multi-layered coils and flexible wiring patterns are formed on a silicon substrate using the semiconductor processing technique. After coils are made, the substrate is removed by etching from the reverse side to obtain a sheet on which multi-layered coils have been formed. Core pieces are made by wire-cut electric discharge machining, and the flexible sheet with coils is wound around core pieces. A 2-pole magnetized permanent magnet is separately fabricated as a rotor Using this process, a prototype micro-motor 1.6 mm in diameter was fabricated and the output power of 3.2×(10)^<-7> Nm was obtained.

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