IIP情報・知能・精密機器部門講演会講演論文集
Online ISSN : 2424-3140
会議情報
104 エリプソメトリー顕微鏡による磁気ディスク表面のナノ分子潤滑膜の可視化
野田 友博福澤 健二三矢 保永
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会議録・要旨集 フリー

p. 37-41

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抄録
Direct visualization method for molecularly thin lubricant films on magnetic disks is presented. Visualization of a molecularly thin film is an extremely useful technique for the investigation of replenishment and retention of thin lubricant films. Ellipsometry can provide thickness and refractive index of a molecularly thin film. However, conventional ellipsometry requires the laser spot to be scanned in order to image a lubricant film, since it can provide information of only one point of a sample surface. In this report, direct visualization method based on ellipsometry is presented. In our elllipsometric microscope, ellipsometric information of a sample surface is converted into dark-bright contrast and is directly visualized with a chilled CCD camera. By the combination of optical and digital image processing techniques, weak contrast are enhanced and interference noise caused by laser coherence are reduced. Thus, our method can provide direct visualization of 1-nm order thick thin lubricant film.
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© 2002 一般社団法人 日本機械学会
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