Abstract
This paper proposed an electrostatic driving mechanism utilizing slanted-pillars without a lead to apply alternative step voltage to a movable electrode. The movable electrode fixed on the slanted-pillars was set on two parallel fixed electrodes. When one electrode was connected to V_0 and the other to the ground, the movable electrode was V_0/2 because capacitances between movable electrode and each fixed electrode are almost same. Alternative electrostatic force caused linear motion of the mover due to anisotropic feature of the friction between pillars and the fixed electrodes. The achieved velocity was about 500μm/s.
