Abstract
This paper describes a high-speed positioning that uses a two-degree-of-freedom control in a ball screw driving table. The ball screw driving table is used to semiconductor-fabrication equipments, so high acceleration, high speed, and high accuracy are demanded. The two-degree-of-freedom control consists a feedback control to decrease a positional error, and a feed forward control to speed up the table. And velocity feedback control is added to control the table vibration. The control system is designed by the simulation that uses two-inertia model. High speed positioning of the table is verified by the experiment.
