The Proceedings of the Conference on Information, Intelligence and Precision Equipment : IIP
Online ISSN : 2424-3140
2007
Session ID : 1100
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1100 Recent movement towards strengthening infrastructure of MEMS industry
Kazuo SATO
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Keywords: MEMS, infrastructure, foundry business, interdisciplinary collaboration, micro, nano science
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[in Japanese]
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© 2007 The Japan Society of Mechanical Engineers
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