Abstract
Loverich et al. have reported a micropump by dielectric elastomer actuation (DEA). The micropump has been fabricated everything from polymer, and achieved highly efficient and low-cost. A microfluidic chip incorporating the DEA micropumps is designed and fabricated in this paper. Assuming an analytical system that should transport sequentially and independently three liquids, the micro fluidic chip was designed. The microfluidic chip consists of three DEA micropumps and check valves. Fabricated microfluidic system performed independent motion of DEA and fluid control. It is possible to transport fluids without mixing. Actual analysis using the chip is future works.
