1110 Fabrication of Arrayed Waveguide Grating using micro-dies technique for Coarse Wavelength Division Multiplex system

Abstract

This paper describes a molding method using a precise micro-die and a ultraviolet light hardening type resin to realize a large amount and low cost production of the planar light waveguide device which is essential for the optical communication and the light control fields. In particular, we examined the Arrayed Waveguide Grating (AWG) which can be used for the Coarse Wavelength Division Multiplexing (CWDM) system. For this purpose, we have designed and analyzed the parameters of the AWG. A Si master block for the AWG production was fabricated by the photo-lithography technology and the dry etching technology. Furthermore, the micro-die was made by the Ni plating and removing a Si master block. Finally, the AWG was molded by the ultraviolet light hardening type resin using the Ni micro-die.