抄録
In advanced information technology, large amount of data is handled and it is necessary to develop ultra-high density data storage devices. So far, many innovative technologies have been proposed in order to increase the recording density of optical disk storage devices. Multilayer optical disk is one of the high-density technologies. This technology, however, has serious technological issues related to optical aberration for multilayered disk media. This paper proposes MEMS-Based aberration free mirror micro actuators using PZT thin films. In this paper, the fundamental design of the proposed MEMS-based micro mirror actuator mechanism is studied and the fabrication process of the mirror actuator is developed.
