Abstract
Recently, large capacity and high track density optical disks have been developed. In such optical storage devices, it is important to develop the positioning control mechanism with high accuracy and high speed in order to control and reduce the tracking error due to the disk radial run out in optical disks. Therefore, this paper proposes the MEMS-based mirror actuator mechanism using PZT thin films. This MEMS mirror fabricated by using silicon micro machining technologies and the characteristics were evaluated. As a result, it was confirmed that the proposed mechanisms have good static and dynamic performances.
